Parts For Sale GASONICS 115480 GASONICS 115480 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details GASONICS 115480 Manufacturer GASONICS Part Number 115480 Description Sensor Optical Interrupt Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other GASONICS Parts A01-012-01 CHAMBER BOTTOM AURA 1000 A06-001-01 vented window Qtz For: Gasonic AE1000/AE2002 A01-163-01 ROD SUPPORT BRACKET 06-0091-01 PLASMA CHAMBER 90-2607 Gasonics 90-2607 PCB Controller Board Rev. F A95-027-01 Prefire Aura Rev 2 A90-005-02 PBC CONTROLLER BOARD INSTALLATION POSSIBLE ON: AURA 1000 ... A90-028-01 PCB INTERFACE 06-0123 LOT of 2: GASONICS 06-0123, CQuartz Coupling, 3-Way, Ext ... 90-1002-01 VALVE CONT. ASSY 95-3153 GAS BOX 71003-15 O-Ring, ParoFluor