Parts For Sale BROOKS ATM-105 BROOKS ATM-105 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details BROOKS ATM-105 Manufacturer BROOKS Part Number ATM-105 Description Equipe Technologies ATM-105 Wafer Transfer Robot Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 3.0 US Other BROOKS Parts GF125CXXC Brooks GF125CXXC Mass Flow Controller MFC Digital (NF3 / ... ATM-104-1-S-CE-S293 ROBOTS ABM-407B-2-S-CE-S293 ROBOTS 9700-9126-01 ASSY, HORIZONTAL DRIVE MOTOR 015-0628-0 SPACER 002-3987-02 BROOKS AUTOMATION 002-3987-02 POWER SUPPLY ATM-105-1 EQUIPE AxM-100 SERIES ROBOT, SHORT521429-U 017-0344-01 Brooks 017-0344-01 End effector, Robot blade, fiber opti ... BM26014 STATION,MID/CTOFF 8116168G001 On-board 8F cryopump 017-0353-01R