Parts For Sale BROOKS 9312-5154 BROOKS 9312-5154 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details BROOKS 9312-5154 Manufacturer BROOKS Part Number 9312-5154 Description THERMAL MASS FLOW RELAY Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other BROOKS Parts BM23995 PCB, CAR, 100, FPM 1350END1CFF1A 70045875 BROOKS-PRI AUTOMATION ASSY, GUARDIAN X AXIS ICT PCB ATM-105-1-S-CE-S293 ROBOTS 5850EC1BE4LA3A 013501-064-25/01 Brooks Automation 013501-064-25/01 Interface Board PCB 0 ... BM12131L01 PCB BOARD 5964S ESC-212B CONTROLLERS 5964C4MAFR5KA ATM-107-2-S-CE ROBOTS PRI 002-5870-06