Parts For Sale BROOKS 9312-5154 BROOKS 9312-5154 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details BROOKS 9312-5154 Manufacturer BROOKS Part Number 9312-5154 Description THERMAL MASS FLOW RELAY Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other BROOKS Parts BM06240RJ PCB ATM-105-1-S-CE PRI ROBOT ESC-200B-S293 CONTROLLERS DBM 2407 V2 Dual arm Atmospheric wafer handling robot ESC-218B-ZT3-CM Aviza 815016-049 CONTROLLER,ESC218B,ZT3,CM For use on: R ... ALIGNER CCD DATA CABLE 002-3465-01 BROOKS SERIAL COMMUNICATION MODULE 017-0344-01 Brooks 017-0344-01 End effector, Robot blade, fiber opti ... BM13258 ASSEMBLY,GEAR BOX, Y MOTOR TLG-I1-AMAT-R1 Brooks Automation TLG-RS232 Transponder Reader TLG-I1-AM ... 5850E CF4 8116168G001 On-board 8F cryopump