Parts For Sale BROOKS 9312-5154 BROOKS 9312-5154 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details BROOKS 9312-5154 Manufacturer BROOKS Part Number 9312-5154 Description THERMAL MASS FLOW RELAY Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other BROOKS Parts 2002-0011-07 CABLE ROBOT/PRE-ALIGIN-SIGNAL-R 5850E MFC 002-7800-05 LOAD PORT MODULE 200MM 013501-064-25/01 Brooks Automation 013501-064-25/01 Interface Board PCB 0 ... 017-0344-01 Brooks 017-0344-01 End effector, Robot blade, fiber opti ... BM26014 STATION,MID/CTOFF 119204 BROOKS 119204 SERIES 8 ROBOT CONTROLLER FREE SHIP 015-0920-01 BOARD, SENSOR, RUDY, ERGO DBM 2406 Dual arm Atmospheric wafer handling robot 8116168G001 On-board 8F cryopump ATM-405-1-S-CE ROBOTS 017-0353-01R