Parts For Sale BROOKS 5964C2MAEJ5KA BROOKS 5964C2MAEJ5KA Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details BROOKS 5964C2MAEJ5KA Manufacturer BROOKS Part Number 5964C2MAEJ5KA Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 NL Other BROOKS Parts 5850E-B1A1B4B ATM305-1-S ESC-218B-ZT3-CM Aviza 815016-049 CONTROLLER,ESC218B,ZT3,CM For use on: R ... 224-112 002-3465-01 BROOKS SERIAL COMMUNICATION MODULE 013501-064-25/01 Brooks Automation 013501-064-25/01 Interface Board PCB 0 ... 002-9400-04 SERIES 8 CONTROLLER 002-8421-02 BROOKSNET DN MODULE DEVICENET I/O NOTE DNET ESC-222B-SMIF CONTROLLERS 209-134 5850E CF4 US5W