Parts For Sale BROOKS 1350EZ21 BROOKS 1350EZ21 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details BROOKS 1350EZ21 Manufacturer BROOKS Part Number 1350EZ21 Description FLOWRATOR 900 500M Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 2.0 BE Other BROOKS Parts 275817 ESC-200 CONTROLLERS BM06241 PCB,Z&R AXIS AMP PCB; EPS 978-457-0442 PRE-300B-CE Brooks PRI 300mm Prealigner PRE-300B-CE 104171 CHUCK, THETA, 1.50 DIA, 2.522 TALL Fixload 25 Brooks Automation 300mm Wafer Load Port Fixload 25 000-6943-01 BELLOWS,ASSY 6-0000-4298-PC TRA 076-LPD-BST Brooks Robot Rail 6-0000-4298-PC Varian ... 8116168G001 On-board 8F cryopump 9701-0418-03 PCB,ASSY,INX,CONTROL,INTERFACE BM25105 MOTOR,X,W/DIF,ENCODER ETHTMM-0152ET ASSY, FIXTURE, VCE-ROBOT AL