Parts For Sale BROOKS 1350EZ21 BROOKS 1350EZ21 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details BROOKS 1350EZ21 Manufacturer BROOKS Part Number 1350EZ21 Description FLOWRATOR 900 500M Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 2.0 BE Other BROOKS Parts ESC-200 CONTROLLERS BM06241 PCB,Z&R AXIS AMP PCB; EPS 978-457-0442 ESC-212B-S293 CONTROLLERS BM23475L11 PCB,SAMS I/O BOARD AMHS 002-8421-02 BROOKSNET DN MODULE DEVICENET I/O NOTE DNET BM34812 TURNTABLE ASSY 1350EPC9ADD1A Flowmeter 06-80010598-001 / T5-XARFH Techware 5 Direct Link Interface Controller with Cables ATM-105-1-S-CE-S293 ROBOTS 8116168G001 On-board 8F cryopump 001-1054-01 ASSY, LIFT ATM107-2-CE PRI ROBOT