Parts For Sale AXCELIS SG26 2167-1 AXCELIS SG26 2167-1 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS SG26 2167-1 Manufacturer AXCELIS Part Number SG26 2167-1 Description ESC ASSY, 200MM, 6 ELECTRODES Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other AXCELIS Parts 17133300 Filament Feed Strap 1789830 Repeller Plate 170162054 3122-0007-0001 EATON AXCELIS NOVA NV6200 RELAY INTERFACE CHASSIS UNIT 4 ... 17A1052 ARM HOLDER FOR HOLDER ASSY 170042741-C TRAY WAFER CERAMIC 170164257 4000001 SPRING 17123410 Insulator Short 1186811 MASTER OSCILLATOR 170164869 170162071