Parts For Sale AXCELIS SG26 2167-1 AXCELIS SG26 2167-1 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS SG26 2167-1 Manufacturer AXCELIS Part Number SG26 2167-1 Description ESC ASSY, 200MM, 6 ELECTRODES Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other AXCELIS Parts 170165838 5000024 ELECTRODE, FACEPLATE CERAMIC STANDOFF, F 664991 17287860 Graphite Cathode Support 5000132 Standoff, 3/8D X 3/8 L,6-32 17033150 BLOCK GRAPHITE 17033150 NV20A (EATON) 170168776 170157616 electrode feedthru cover(外) 170166376 17182580 STRIKE PLATE (2) DISK FARADAY 58636 170160841