Parts For Sale AXCELIS SG26 2167-1 AXCELIS SG26 2167-1 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS SG26 2167-1 Manufacturer AXCELIS Part Number SG26 2167-1 Description ESC ASSY, 200MM, 6 ELECTRODES Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other AXCELIS Parts 170165838 170162548 17100510 17287850 Filament, ELS .040 170164281 120000700Z 300MM HE IMPLANTER LINAC FEEDTHRU 170164512 FRONT STOCK PLATE 17031140 BELLOWS ASSY SOURCE BUSHING 17342870 VARIAN/AXCELIS: 17342870; RESOLVING APERTURE (1) ULTRE E ... 1789840 INSERT REPELLER RETAINER INSERT #1789840 A2M1/A2M2 NV-10 ... 4300031 Retaining Rod Clip