Parts For Sale AXCELIS LU-A-664 AXCELIS LU-A-664 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS LU-A-664 Manufacturer AXCELIS Part Number LU-A-664 Description COVER,FRONT Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other AXCELIS Parts 1155820 ASSY DI POWER CONDITIONER (NV20A) 64481 PHOTOSENSOR INTERUPTER PCB 110141810 ASSY WAFER PAD SENSOR 8465-0002-0062 WASHER,LOCK,HLCL,SST,#6,.250 170010540 PEF-XE Shower Tube Aperture 5990-0005-0001 PCB, TRANSMITTER, FIBER OPTIC, 5990-0005-00 17227050 APERTURE TERMINAL 17287880 Filament Clamp, ELS 17128230 Spacer, Shoulder Screw 11S4278 FARADAY BELLOWS 17189150 AXCELIS PLATE CATHODE ELS SUPPORT GRAPHITE 17033140 AXCELIS_17033140_SPRING