Parts For Sale AXCELIS LU-A-664 AXCELIS LU-A-664 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS LU-A-664 Manufacturer AXCELIS Part Number LU-A-664 Description COVER,FRONT Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other AXCELIS Parts ID8030F DIODE 17055991 GRAPHITE VALVE V2 CVR 102273 102273 SCR-MCH, PAN, PHL, SS, NF 17121850 Repeller Insulator 3111-0004-0001 Insulator, Filament 5880-1219-0001 PLATE ADAPTER 11046430 ASSY CATHODE LINE WIRE (11B0880) 17128230 Spacer, Shoulder Screw 17142890 AXCELIS TECHNOLOGIES INC BREAK THERMAL CH341-ND SWITCH ELEVATOR CASSETTE SENSOR 17033090 Support, Thermocouple 528121 PLATE ASSY