Parts For Sale AXCELIS 830069321 AXCELIS 830069321 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 830069321 Manufacturer AXCELIS Part Number 830069321 Description HEATER, 150W OD=10 Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 4.0 US Other AXCELIS Parts 17060390 Lead High Voltage End 17B5099 FILAMENT CONNECTOR 200MM GSD ULTRA 11B4799 Resonator_Motor,_HE3 17287680 FLANGE SEAL 1178170 Disk Index Assy 8" GSD 200 17248060 FILAMENT BOTTOM RING 1224960 XFMR 9KVA 180VAC 4.2VAC SNGL-PH 50/60HZ SIG AIR 17267060 GRAPHITE, FIXED APERTURE .16 IN, EATON CVA 170159914 028322 COMPRESSION SPRING 4000059 Retaining Rod Spring APVE17014660