Parts For Sale AXCELIS 830069321 AXCELIS 830069321 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 830069321 Manufacturer AXCELIS Part Number 830069321 Description HEATER, 150W OD=10 Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 4.0 US Other AXCELIS Parts 17101230 Filament Shield 7435-0003-0001 Thermocouple Gauge Tube, DV4D Type 170155729 SHLD BEAMGUIDE HORIZONTAL 1751940 SPRING, FLEXURE AT4 NV10 17234240 Clamp Isolator 1745670 GRAPHITE, APERTURE #2, NV10-160 17089711 AXCELIS ELECTRODE HIGH VGI 11008122 ELECTRON SHOWER IV POWER SUPPLY ASSY 1520300 PCB ASSY PLGR POSN SENSE 47402 Quartz Lenz UV Backed 17B8695 GRAPHITE LINER (1) 3100-0021-0090 'INSERT, VOLUME REDUCTION'