Parts For Sale AXCELIS 66991 AXCELIS 66991 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 66991 Manufacturer AXCELIS Part Number 66991 Description Bushing, Graphite Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Unknown 4.0 US Other AXCELIS Parts 0342-1127-1001 CONNECTOR ASSY VALVE BLK WLDT 170162628 1181020 / 55S0007 / 5500203 TRANSFER ARM MOTOR, GSD 52411 052411 PROBE INSULATOR PROBE 17335030 Ground Electrode 2 170052820 INSULATOR 170060400 INSULATING BREAK ARM VAE 17099661 Outer Beam Dump /AC 17167970 SCREW, GRAPHITE HEAD EATON 00500003 Lambda EMI 00500003 Power Supply SX5025-5KV-NEG-DC-AIR-1 ... 563111 VALVE ASSY-CHAMBER,PS3 17121930 Cathode Nut - Moly, ELS