Parts For Sale AXCELIS 585021 AXCELIS 585021 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 585021 Manufacturer AXCELIS Part Number 585021 Description WAFFER PAN ASSY-200MM,300PLATFORM Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 2.0 US Other AXCELIS Parts 170162628 LUP-143 Bearing, Cam Follower 110141810 ASSY WAFER PAD SENSOR 17099631 Inner Beam Dump w/AC 5990-0005-0001 PCB, TRANSMITTER, FIBER OPTIC, 5990-0005-00 170111300 Axcelis HEI Source Extraction Bushing (PN: 170111300) AX ... 17158000 Cathode,Two piece Moly/Tungsten 17F6732 AXCELIS_17F6732_LINER AMU BELLOWS 17033140 AXCELIS_17033140_SPRING 17122930 LINER EXTENSION TUBE 17227030 APERTURE POST ACCEL 17B8083 COOLING APERTURE FOR Q-LENS ASSY