Parts For Sale AXCELIS 571821 AXCELIS 571821 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 571821 Manufacturer AXCELIS Part Number 571821 Description SUB CHAMBER ASSEMBLY RIGHT Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other AXCELIS Parts 170164646 4710-0069-0001 MOUNT ARC CHAMBER REPELLER SIDE, ELS AXCELIS 4710-00 ... 17349970 M8 CARBON SCREW 437581 PWB ASSY WAFER HANDLER CARD 11636546 0295-0082-0001 APERTURE, EXIT, ELEC. QUAD, QUADRUPOLE 170166090 GRAPHITE CL1TXT APERTURE, 8MM X 80MM, VCI 170156097 170160719 170031490 212812 MOTOR ASSY EXT/RET TRANSPORTER 1906850 IN-VAC ARM BELLOWS