Parts For Sale AXCELIS 5500141 / 1178980 AXCELIS 5500141 / 1178980 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 5500141 / 1178980 Manufacturer AXCELIS Part Number 5500141 / 1178980 Description Resonator Motor, HE/VHE Status Available Approx. Qty 11 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 11.0 SG Other AXCELIS Parts 4001166 AXCELIS SPRING SHOULDER SCREW INCONEL 3500068 O-RING, 012 3500313 O-RING -222 BUNA 1/8 150008320 PCB 170164281 17335010 Ground Electrode 1 17C7703 BOLT HEAD SHIELD(3) 170163113 LINER BOTTOM ARC CHAMBER W 0897-0033-0001 Arc Chamber, SKM 1504130 PCB OPTO-ISOLATOR 1504130 REV E 17S3577 AXCELIS_17S3577_GROUND ELECTRODE CARRIER 17121740 Repeller