Parts For Sale AXCELIS 5001373 AXCELIS 5001373 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 5001373 Manufacturer AXCELIS Part Number 5001373 Description STARTER 5HP AE16DNSOA Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other AXCELIS Parts 3500127 ULE O RING 014 (SOURCE VAP) 17355290 Cathode Repeller 1914290 AXCELIS_1914290_BELLOW 4400309 SCREW VENTED 8-32X1/2 S/H/C 17156990 CATHODE/ARC WIRE ELS/IAS 17170040 Extraction Electrode Insert 17306640 Gasket Plasma Cap Moly 17138490 INSULATING BUSHING PKG 2 17S3577 AXCELIS_17S3577_GROUND ELECTRODE CARRIER 17338680 BEAM DEFINING APERATURE 1789890 Electric Strap 1520560 PCB ASSY SOURCE CONTROL II