Parts For Sale AXCELIS 491641 AXCELIS 491641 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 491641 Manufacturer AXCELIS Part Number 491641 Description KIT-COOLING RETROFIT AIM 491641 Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 2.0 NL Other AXCELIS Parts 469431 END-EFFECTOR VACUUM ARM 3-AXIS ROBOT 170162054 3500068 O-RING, 012 150008320 PCB 170164281 170111300 Axcelis HEI Source Extraction Bushing (PN: 170111300) AX ... 170163113 LINER BOTTOM ARC CHAMBER W 170042741-C TRAY WAFER CERAMIC 17192420 GROUND PLATE 1504130 PCB OPTO-ISOLATOR 1504130 REV E 313681 POWER SUPPLY, +5v, +12v, -12v, +24v 17182600 STRIKE PLATE (4) DISK FARADAY