Parts For Sale AXCELIS 28586 AXCELIS 28586 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 28586 Manufacturer AXCELIS Part Number 28586 Description AFFINITY CHILLER PUMP MTH Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 CN Other AXCELIS Parts 170162054 150008320 PCB 17119450 LINER - EXTENSION TUBE VG 5990-0115-0001 PCB,MONITOR & CHILLER,SCAN,5990-0115-0001 170164281 1751940 SPRING, FLEXURE AT4 NV10 170163113 LINER BOTTOM ARC CHAMBER W 170042741-C TRAY WAFER CERAMIC 1504130 PCB OPTO-ISOLATOR 1504130 REV E 17189150 AXCELIS PLATE CATHODE ELS SUPPORT GRAPHITE E19000940 Drive Shaft Assembly 392171 TUBE, SAPPHIRE FUSION STRIPPER