Parts For Sale AXCELIS 264001 AXCELIS 264001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 264001 Manufacturer AXCELIS Part Number 264001 Description WAFER CERAMIC PAN ASSY Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Used 2.0 US Other AXCELIS Parts 0342-1383-0001 ASSY METERING VALVE GAS SYSTEM 17132290 Ground Electrode Insert 282711 282711 TUBE HOLDER-OUTLET TUBE 170164512 FRONT STOCK PLATE 17233330 LINER VG MAGNET DUCT 424381 PWB ASSY PDB CONTROL BOARD 283501 283501 CLAMP-ELBOW, GAS OUTLET 17142890 AXCELIS TECHNOLOGIES INC BREAK THERMAL 0342-1000-4001 PCB,I/O,POWER,H4,EATON 0342-1000-4001 17342890 DUST SHIELD APERTURE 17170070 Electrode Shield 342161 DISPLAY TOUCHSCREEN