Parts For Sale AXCELIS 264001 AXCELIS 264001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 264001 Manufacturer AXCELIS Part Number 264001 Description WAFER CERAMIC PAN ASSY Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Used 2.0 US Other AXCELIS Parts 238171 238171 CLAMP-DIAPHRAGM, INNER, GEN 2 3500123 SEAL 5951-0012-0001 MED ELECTRODE POST RX FEEDTHRU 4173600 AXCELIS_4173600_INSULATOR, FILAMENT 28322 SPRING-COMPRESs SS .360 OD S ,FREE LENG 1.125 17192430 RING FIELD 239892 239892 O-RING AS014 O RING-KALREZ, 2-014-4079 9298812 Cutler Hammer 9-2988-12 Eaton Freedom Coil 265843 PWB ASSY LAMP POWER SUPPLY INTERFACE CARD 464911 BELT, TIMING UPPER ROTATE 1520560 PCB ASSY SOURCE CONTROL II 17121740 Repeller