Parts For Sale AXCELIS 264001 AXCELIS 264001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 264001 Manufacturer AXCELIS Part Number 264001 Description WAFER CERAMIC PAN ASSY Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Used 2.0 US Other AXCELIS Parts 17320320 SPACER STRIKE PLATE 1740500 Shield Extrc Electrode 17129700 Strike Plate #1 17101230 Filament Shield 1700340 SCREW BALL CHAMBER DRIVE NOVA IMPLANTER, NV 10-80 1100440 20KV Feedthrough 17270200 BLOCK, GRAPHITE EXIT AMU 11B1584 ELECTRODE ASSEMBLY 7142-0019-0002 SLIT PINNED FRONT FIXED A FOR 8250 AXCELIS 7142-001 ... 680051 CAPACITOR C101 1.13MFD PS FUSION 150 OLD 081312 3912162 Olympus PSD-10 Electrosurgical Unit P/N 3912162 5880-1125-0001 PLATE, GND, SCAN SUPR PRIMARY