Parts For Sale AXCELIS 264001 AXCELIS 264001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 264001 Manufacturer AXCELIS Part Number 264001 Description WAFER CERAMIC PAN ASSY Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Used 2.0 US Other AXCELIS Parts 1193490 SPINDLE DIRECT DRIVE ASSY W/CHARGE SENSOR 17115930 Plate Aperture, Linac VG 17270090 BLOCK (3) FEM 17173230 APERTURE, ENTRANCE E SHOWER 281621 PWB ASY MCU CHAMBER CONTROL 63051 AXCELIS POWER TRANSFORMER DUAL 115/230V 50/60 HZ SIGNAL ... 17248060 FILAMENT BOTTOM RING 17131830 GRAPHITE SHIELD MAGNETIC ELECTRON DEFLECTOR 17127600 Repeller, Moly 309211 VALVE, HPS, FORELINE, ISO NW50, GPL, MCU 7098-0123-0001 CHUCK SHAFT W/SLIP RINGS, UPPER, ES CLAMP, NV-8200P 17249700 SHOWER TUBE RING PLASMA SHOWER