Parts For Sale AXCELIS 264001 AXCELIS 264001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 264001 Manufacturer AXCELIS Part Number 264001 Description WAFER CERAMIC PAN ASSY Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Used 2.0 US Other AXCELIS Parts 1166-0002-0002 Magnet Terminal Data Link 560821 CPU MODULE ASSY-ZERO CROSSING DETECTION 1193490 SPINDLE DIRECT DRIVE ASSY W/CHARGE SENSOR 17125571 Ground Electrode, Manipulator 170162548 5500007 GR MOT PTMN GM8712-41 187:1 5990-0230-0001 PCB ASSY BEAM PROFILER INTERFACE BD 7142-0019-0002 SLIT PINNED FRONT FIXED A FOR 8250 AXCELIS 7142-001 ... 17099661 Outer Beam Dump /AC 300000745 GEMS TYPE RFA ROTOR FLOW SENSOR 269641 LUBRICANT NSK GREASE NO. 2 170093560