Parts For Sale AXCELIS 17B5164 AXCELIS 17B5164 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 17B5164 Manufacturer AXCELIS Part Number 17B5164 Description FEEDTHRU,PSG #17B5164 Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 7.0 US Other AXCELIS Parts 170162054 17123420 Insulator, Long 17331320 APERTURE CURVED RIGHT CVA 17165810 ARC SLIT 20R W ELS/IAS 5000132 Standoff, 3/8D X 3/8 L,6-32 282858801 PCB, Stepper Motor 170042741-C TRAY WAFER CERAMIC 11008122 ELECTRON SHOWER IV POWER SUPPLY ASSY 1186811 MASTER OSCILLATOR 17S2467 ELECTRODE, GND GRAPHITE, FOR GSD 17D3767 Axcelis Beam Plate, 17D3767, New, Sealed 170155174 BOX TOP SERRATED PEF