Parts For Sale AXCELIS 17B5164 AXCELIS 17B5164 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 17B5164 Manufacturer AXCELIS Part Number 17B5164 Description FEEDTHRU,PSG #17B5164 Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 7.0 US Other AXCELIS Parts 6000113 POTEN 2K OHM 17B8081 AXCELIS_17B8081_FIRST DEFINING APERTURE 170173343 3500027 O-Ring, Buna APVE17036930 28322 SPRING-COMPRESs SS .360 OD S ,FREE LENG 1.125 1522723 PCB ASSEMBLY TM990 310 I/O V.4 (1519930) 1766531 GRAPHITE, BURN-THRU SENSE PLATE ( VT 1820293 PAD PED CLEANING 200MM 17334760 APERTURE, EXTENSION 401261 ORIFICE SAPPHIRE 3300138 GAUGE XMTR 30PSI MALE IPT122