Parts For Sale AXCELIS 17B5164 AXCELIS 17B5164 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 17B5164 Manufacturer AXCELIS Part Number 17B5164 Description FEEDTHRU,PSG #17B5164 Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 7.0 US Other AXCELIS Parts 1789830 Repeller Plate 4100211 CPLG HECI-CAL 1% AC0050-4-3 1550-0052-0003 Axcelis / Eaton: 1550-0052-0003 Electrode Extraction 7230-0003-0014 Standoff, 3/8D X 3/4L, 6-32 11022720 17308510 ARC SLIT T15R KEYED W 1191550 SOURCE FLANGE 4400034 WASHER, LK #6, SPLIT, SST 091811 KIT DIFFUSER 091811 58636 17102651 VG MAGNET PLATE 17270130 APERTURE (1) FEM