Parts For Sale AXCELIS 17B5164 AXCELIS 17B5164 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 17B5164 Manufacturer AXCELIS Part Number 17B5164 Description FEEDTHRU,PSG #17B5164 Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 7.0 US Other AXCELIS Parts 66551 MANIFOLD AIR NOZZLES 17253420 Heat Shield Gasket 0342-0922-4001 driver board 496831 VACUUM VALVE ASSY-GES 17107230 n/a 3500115 O-RING FLAG DIFFERENTIAL SEAL(NON-CATALOG) 1319413 EATON 1319413 PROTECTIVER COVER * NEW IN FACTORY BAG * 17121750 INNER CUP SHIELD ELS 11S4278 FARADAY BELLOWS 0342-1486-0002 CABLE,X2,SCAN AMP,NV6200AV 1550-0061-0001 ELECTRODE GROUND LOT OF 7 FOR 8250 AXCELIS 1550-0 ... 17D8601 Axcelis 17D8601 GROUND ELECTRODE