Parts For Sale AXCELIS 17B5164 AXCELIS 17B5164 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 17B5164 Manufacturer AXCELIS Part Number 17B5164 Description FEEDTHRU,PSG #17B5164 Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 7.0 US Other AXCELIS Parts 17170040 Extraction Electrode Insert 4400099 SCREW 17122900 SHEILD EXIT INNER BAGGED 17189150 AXCELIS PLATE CATHODE ELS SUPPORT GRAPHITE GPS Axcelis Fusion GPS UV Bake 170156097 170160719 403341 MANIFOLD 300000745 GEMS TYPE RFA ROTOR FLOW SENSOR 17089730 GROUND PLATE MOD 17138740 REAR SHIELD REFLECTOR VGI 1174840 SENSOR INTERFACE BOX FRONT 11S1594 GSD