Parts For Sale AXCELIS 17B5164 AXCELIS 17B5164 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 17B5164 Manufacturer AXCELIS Part Number 17B5164 Description FEEDTHRU,PSG #17B5164 Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 7.0 US Other AXCELIS Parts 210000543 LVPS AC/DC 1500W 12V 28V 48V PS 1914440 ROLLER SLIDE S/S 1181020 / 55S0007 / 5500203 TRANSFER ARM MOTOR, GSD 17164500 GAS BLEED TUBE 17394840 BOLT HEAD SHIELD 2 1104900 POWER SUPPLY,SUPPRESSION,1104900 4000068 SPRING,COMPRESSION,MANIPULATOR 17192420 GROUND PLATE 1900400 Electron Shower Filament 102022 102022 SCR-MCH, PAN,PHL,SS, 4-40X0.25 17287870 Cathode Insulator Block 17331310 APERTURE CURVED LEFT