Parts For Sale AXCELIS 17B5164 AXCELIS 17B5164 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 17B5164 Manufacturer AXCELIS Part Number 17B5164 Description FEEDTHRU,PSG #17B5164 Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 7.0 US Other AXCELIS Parts W117V-3H-F11TB-X30056 Whitman Controls 17107960 SUPPORT FILAMENT 3500127 ULE O RING 014 (SOURCE VAP) 101606 WSHR FLAT SS #6 0.156 ID 82882 transfer arm cable For: Fusion 1914290 AXCELIS_1914290_BELLOW 437581 PWB ASSY WAFER HANDLER CARD 17189150 AXCELIS PLATE CATHODE ELS SUPPORT GRAPHITE 17S3577 AXCELIS_17S3577_GROUND ELECTRODE CARRIER 17338680 BEAM DEFINING APERATURE 17033140 AXCELIS_17033140_SPRING 1789890 Electric Strap