Parts For Sale AXCELIS 17B5164 AXCELIS 17B5164 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 17B5164 Manufacturer AXCELIS Part Number 17B5164 Description FEEDTHRU,PSG #17B5164 Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 7.0 US Other AXCELIS Parts 549391 HV MODULE GEMINI GPL GES 17123430 RETAINER (5/16 18) 1155820 ASSY DI POWER CONDITIONER (NV20A) 3402676 Connector Male for Assy 1087750 3500099 O-RING BUNA 203(M&P-EMP203B231) MIN ORDER 100 320B0135; 80972 BEARING BALL FLANGED 1104900 POWER SUPPLY,SUPPRESSION,1104900 11-10-3-BV-24Q SOLEOID VALVE 100PSI N/C 24VDC 17122980 AXCELIS GRAPHITE ELECTRODE SHIELD 35S0017 ULE O RING 271 (ELECT CONFIN) 17F6732 AXCELIS_17F6732_LINER AMU BELLOWS 17192410 SUPPORT PLATE