Parts For Sale AXCELIS 17066300 AXCELIS 17066300 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 17066300 Manufacturer AXCELIS Part Number 17066300 Description SHIELD CUP Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 4.0 US Other AXCELIS Parts 17250340 APERTURE SELECTABLE VG 17125571 Ground Electrode, Manipulator ST-200 17250360 SHIELD SUPPORT, SELECT APERTURE 17242360 BASE GRAPHITE COVER 17133340 Cathode Repeller 1224960 XFMR 9KVA 180VAC 4.2VAC SNGL-PH 50/60HZ SIG AIR 17394880 LINER 2 REV.A 170164277 17182570 STRIKE PLATE (1) DISK 17249700 SHOWER TUBE RING PLASMA SHOWER 17170070 Electrode Shield