Parts For Sale AXCELIS 170166520 AXCELIS 170166520 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 170166520 Manufacturer AXCELIS Part Number 170166520 Description Status Available Approx. Qty 100 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 100.0 – Other AXCELIS Parts 170168318 170173343 170174465 170168776 17248060 FILAMENT BOTTOM RING 11636546 170168820 17122940 APERTURE POST ACCEL 17089711 AXCELIS ELECTRODE HIGH VGI 17127600 Repeller, Moly 5880-1125-0001 PLATE, GND, SCAN SUPR PRIMARY 17182600 STRIKE PLATE (4) DISK FARADAY