Parts For Sale AXCELIS 170166222 AXCELIS 170166222 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 170166222 Manufacturer AXCELIS Part Number 170166222 Description Status Available Approx. Qty 100 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 100.0 – Other AXCELIS Parts 170166369 4100028 E-SOWER, FILAMENT CLAMP RING 17133270 Cathode Insulator, ELS/VAE 170168820 170168318 E19000940 Drive Shaft Assembly 170168625 17287680 FLANGE SEAL 170162620 17331310 APERTURE CURVED LEFT 170174465 170168776