Parts For Sale AXCELIS 170166222 AXCELIS 170166222 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 170166222 Manufacturer AXCELIS Part Number 170166222 Description Status Available Approx. Qty 100 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 100.0 – Other AXCELIS Parts 170166376 170166520 405241 Heater Window/Quartz Plate Lower Sapphire Coated 11636546 170062760 E19000940 Drive Shaft Assembly 17132290 Ground Electrode Insert 170078000 5880-0667-0001 SOURCE BASE PLATE 170174465 17127650 Filament Shield 1906850 IN-VAC ARM BELLOWS