Parts For Sale AXCELIS 170166222 AXCELIS 170166222 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 170166222 Manufacturer AXCELIS Part Number 170166222 Description Status Available Approx. Qty 100 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 100.0 – Other AXCELIS Parts 11031080 664991 17132290 Ground Electrode Insert 590831 17033150 BLOCK GRAPHITE 17033150 NV20A (EATON) 17133310 Arc Chamber W ELS/VAE 091811 KIT DIFFUSER 091811 58636 3500211 O-RING VITON 012 668381 590752 17A5595