Parts For Sale AXCELIS 170164865 AXCELIS 170164865 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 170164865 Manufacturer AXCELIS Part Number 170164865 Description Status Available Approx. Qty 100 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 100.0 – Other AXCELIS Parts 170165838 17254850 Filament, ELS 64481 PHOTOSENSOR INTERUPTER PCB 17127610 Shield, Insulator 664991 590831 17248060 FILAMENT BOTTOM RING 58636 17306630 Moly Plasma Cap 668381 170093560 590752