Parts For Sale AXCELIS 170164646 AXCELIS 170164646 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 170164646 Manufacturer AXCELIS Part Number 170164646 Description Status Available Approx. Qty 100 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 100.0 – Other AXCELIS Parts 170166376 17133340 Cathode Repeller 1166-0002-0002 Magnet Terminal Data Link 170166520 11636546 170062760 17128110 Arc Slit, 15R Moly 17182590 STRIKE PLATE (3) DISK 1717480 Arc Chamber Front Plate 170078000 170174465 17248090 FILAMENT CLAMP RHC INSULATOR