Parts For Sale AXCELIS 170164278 AXCELIS 170164278 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 170164278 Manufacturer AXCELIS Part Number 170164278 Description Status Available Approx. Qty 100 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 100.0 – Other AXCELIS Parts APVE17121620A 319371 ASSY, MAGNETRON FUSION WATER COOLED APVE17036930 590831 4400183 BOLT, 1/2L 17275100 ENTRANCE APERTURE 17098511 Source Housing Exit Aperature /AC 17192420 GROUND PLATE 170164277 677511 58636 17102651 VG MAGNET PLATE