Parts For Sale AXCELIS 170164278 AXCELIS 170164278 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 170164278 Manufacturer AXCELIS Part Number 170164278 Description Status Available Approx. Qty 100 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 100.0 – Other AXCELIS Parts 170165838 17097240 Insulator 6654-0002-0001 17272300 SHIELD TUBE SELECTABLE APERTURE 664991 17099631 Inner Beam Dump w/AC 1766531 GRAPHITE, BURN-THRU SENSE PLATE ( VT 170168776 170164646 170057060 58636 17270060 PLATE;17270060,liner #7 striker FEM UOM: PC