Parts For Sale AXCELIS 1521940 AXCELIS 1521940 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 1521940 Manufacturer AXCELIS Part Number 1521940 Description PCB ASSY VARIABLE SLIT SOURCE CONTROL Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other AXCELIS Parts 17161640 / 17117640 / 10014520 Bellows, V3, GSD, 50 Cons 17118510 GRAPHITE POLE SHORT ES QUAD VG 17303890 CLAMP, ISOLATER PEF 17189160 TZM FILAMENT CLAMP ELS IA 150008320 PCB 17270090 BLOCK (3) FEM 170164281 17292630 LINER REPELLER MOLY 170163113 LINER BOTTOM ARC CHAMBER W 17S3577 AXCELIS_17S3577_GROUND ELECTRODE CARRIER 0342-0549-2001 RESISTOR ASSY STR 12 GAP COL 0342-0458-4001 PCB ASSY UNLOAD STATION