Parts For Sale AXCELIS 152053 AXCELIS 152053 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 152053 Manufacturer AXCELIS Part Number 152053 Description DOSE OPTO ISOLATOR ASSY 152053 REV B Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 NL Other AXCELIS Parts 170165838 17127590 ARC CHAMBER 170162548 150008320 PCB 17164500 GAS BLEED TUBE 170164281 17250360 SHIELD SUPPORT, SELECT APERTURE 3500641 SEAL 4 X 310D X 251D FOR NOVA GSD, S 17133340 Cathode Repeller 170163113 LINER BOTTOM ARC CHAMBER W 1909360 FILAMENT ELECTRON SHOWER 300000745 GEMS TYPE RFA ROTOR FLOW SENSOR