Parts For Sale AXCELIS 1165631 AXCELIS 1165631 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 1165631 Manufacturer AXCELIS Part Number 1165631 Description HIGH VACUUM VALVE GSD'S Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other AXCELIS Parts 17170020 Extraction Electrode /AC LUP-144 Plunger Spring 3500163 O-RING VITON 214 3400584 CLAMP NW 16/10 31-2901 H 17083060 FEEDTHRU NO.3S/S FOR EFG GSD'S 1740530 GRAPHITE, GROUND ELECTRODE, NV10-160 1192420 17127610 Shield, Insulator 1708680 INSULATOR, FILAMENTCERAMIC EGN 251421 Axcelis Part Nbr: 251421 Flag Sensor for Rotation Mtr.< 17208240 TE Aaperature 19010120