Parts For Sale AXCELIS 1066-0009-1001 AXCELIS 1066-0009-1001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 1066-0009-1001 Manufacturer AXCELIS Part Number 1066-0009-1001 Description Valve, Coupling Leak Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 4.0 US Other AXCELIS Parts 17230090 ARC SLIT T15 W 17128110 Arc Slit, 15R Moly 1550-0017-0001 Axcelis 1550-0017-0001 3 PC Arc Chamber Top3 PC Arc Cham ... 17170060 Electrode Spacer 4700-0003-0001 17D8110 AXCELIS_17D8110_INSULATOR COVER(LONG) 17192420 GROUND PLATE 17320000 APERTURE ENTRANCE BEAM TUNNEL 170049570 E41000136 17254970 FEEDTHROUGH SUPPRESSION GSD 170164636