Parts For Sale AVIZA K52316 AVIZA K52316 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AVIZA K52316 Manufacturer AVIZA Part Number K52316 Description KIT. CHAMBER PUMP PURGE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 – Other AVIZA Parts 900615-001 TANK,ETCH- WELD For use on: WJ 999,1000,1500 901050-001 AVIZA・ASML・WJ 901050-001 WFR,PF,6",1TC,PKG-ASSY 085460-000 FIT,BRS,UN,ROT,3/8NPTx3/8 105318-03 SCREW,JACK,FCE,LIFT ASY. For use on: AVP/RVP200MM 2012474-001 CABLE,PLC INPUT,ECV POSITION SENSOR--ASSY 817005-001 MFC,NC,N2,30L,DEVICE NET,C3165 171840-002 VTR- ASSY,CASS PRESENCE DET "UNIV" For use on: VTR 705199-001 O-RING,9.975ID X.210W,VITON 161090-001 VTR- PCB ASY,T.C. H2 VAL INTERLOCK For use on: VTR 104177-01 VTR- PLUG,END,HEATER,OX-200MM For use on: VTR 815015-744 CIRCUIT BREAKER,3P,30A 084921-000 SCREW,SS,SOCKET HEAD,10-32 X.3750"L