Parts For Sale AVIZA K52316 AVIZA K52316 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AVIZA K52316 Manufacturer AVIZA Part Number K52316 Description KIT. CHAMBER PUMP PURGE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 – Other AVIZA Parts A 4950701 781053-003 O-RING,11.475ID X.275T,V884-75 708394 907805-003 VTR- BELT,TMG,HTD,5MMP,NPRN,85G,9.. MM WIDE 815020-175 O-RING,PERLAST,NW100 815001-404 SEAL,TEFLON,.125IDX.312OD 2026418 PIN, WAFER SUPPORT, CHAMFER TOP For use on: ALD 900312-020 CONN, PCB, 20 PIN, W/O EARS 601366-01 VTR- ASSY,HRNS,GIF INTERC,PWR 911083-002 DIN-a-mite Solid State Power Control Heater WATLOW DC11- ... 105414-01 CLAMP,SCREW,LIFT 600496-01 VTR- WTM MOTOR R AXIS,200MM -APL For use on: VTR