Parts For Sale AVIZA K52316 AVIZA K52316 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AVIZA K52316 Manufacturer AVIZA Part Number K52316 Description KIT. CHAMBER PUMP PURGE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 – Other AVIZA Parts A 04299001 605460-04 MECHANICAL WFR CNTR ASSY,8 IN For use on: AVP/RVP200MM 163195-001 VTR- MOTOR,IBM ELEVATOR -APL For use on: VTR 161090-002 VTR- PCB ASSY,T.C H2 VALVE INTLK For use on: VTR 961123-000 CARD,RS232- CIRCUIT CARD ASSEMBLY For use on: WJ 999,100 ... 793052-001 RING, RETAINING, .23 OD 605076-02 PCB CONFIG,TEOS ALARM BD For use on: AVP/RVP200MM 172046-002 VTR- COVER,SENSOR,ST For use on: VTR 083913-000 POWER SUPPLY,+12V,-12V,+5V For use on: RVP300MM 815018-165 CABLE,DEVICENET,MID,STRAIGHT FEMALE TO RIGHT ANGLE FEMAL ... A47254 ESC RF FILTER BOX A45391 LOOM. PC104 PSU AC