Parts For Sale AVIZA K52316 AVIZA K52316 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AVIZA K52316 Manufacturer AVIZA Part Number K52316 Description KIT. CHAMBER PUMP PURGE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 – Other AVIZA Parts 2010934-001 CABLE ASSY,SHUTTER UP SENSOR,MINIBATCH,300MM 109102-09 SUPPORT,BLOWER,R/H,ENVIR,PWDR 906646-001 PCB ASSY,CONFIGURATION,INPUT/OUTPUT,48 CHANNEL -APL For ... 600186-01 VTR- ASSY,PCB,DOOR CLOSED SWITCH For use on: VTR 914219-001 WATKINS-JOHNSON 914219-001 E FLOW MODULE, BUBBLER, SOUR ... 900638-060 O-RING,SILICON,70D,12.975X .27,1 EACH IN POLY KRAFT BAG ... 085577-000 PLC,REFURBISHED,32 POINT,OUTPUT,TTL,SERIES 90-30 602598-01 VTR- KIT,ESD,E-BASE -PL For use on: VTR AC1969 MAG & PHASE CT8086-002 113316-01 BRACKET,T/C ENCLOSURE 300MM-3.5METER 905594-011 MFC(UFC1100A)N2,1SLPM,1/4VCR 602364-01 VTR- ASSY,PCB,ACE CPU For use on: VTR