Parts For Sale AVIZA K52316 AVIZA K52316 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AVIZA K52316 Manufacturer AVIZA Part Number K52316 Description KIT. CHAMBER PUMP PURGE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 – Other AVIZA Parts 708394 906646-001 PCB ASSY,CONFIGURATION,INPUT/OUTPUT,48 CHANNEL -APL For ... 630010-01 PCB,DIGITAL OUTPUT BD,SLOT 2- APL For use on: RVP300MM 815001-631 RECEPTACLE,PIN,QDISC,50AMP,BLACK 908728-001 COVER,CONVEYOR,UNLOAD,BEARING,3 For use on: WJ 999,1000,1500 156771 171714-001 VTR- ASSY,MOTOR MOD For use on: VTR 2006088-001 SUPPORT, QUARTZ PROCESS TUBE, CVD, 300MM MB For use on: ... 600495-01 VTR- ASSY,PCB,WTM TOP,200MM For use on: VTR 600568-05 VTR- T/C SPIKE ASSY,SINGLE K,200MM For use on: VTR 165934-001 LATCH ASSY For use on: AVP/RVP200MM 252072 MOTOR/GEARBOX MAXON 500:1