Parts For Sale AVIZA K52316 AVIZA K52316 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AVIZA K52316 Manufacturer AVIZA Part Number K52316 Description KIT. CHAMBER PUMP PURGE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 – Other AVIZA Parts 604195-02 WAFER ALIGN SENSOR ASY,EMITTER 104194-06 VTR- PULLEY,5MM PITCH 24 GROOVES For use on: VTR 901050-001 AVIZA・ASML・WJ 901050-001 WFR,PF,6",1TC,PKG-ASSY 906646-001 PCB ASSY,CONFIGURATION,INPUT/OUTPUT,48 CHANNEL -APL For ... 908110-002 VTR- VIDEO BD FOR 9"CRT 908110-001 196672 918032-001 SHIELD N2 WJ1000 118090-001 TEMP CONTROL BOARD. B-TYPE 196343 105414-01 CLAMP,SCREW,LIFT 155669 THERMOCOUPLE 908193-001 ANALOG BOARD,EXTENDED(SEMY) SEMY ENGINEERING 908193-001