Parts For Sale AVIZA 620664-01 AVIZA 620664-01 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AVIZA 620664-01 Manufacturer AVIZA Part Number 620664-01 Description BODY,DISK VALVE,F.A.C.,300MM- APL Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 – Other AVIZA Parts 912113-001 SCREW,VENT,INJECTOR 781053-003 O-RING,11.475ID X.275T,V884-75 189324 ASSY. PIN 150/200MM 815015-235 LED,CLUSTERED,RED,24VDC/30,PLUG-IN 927655-001 KIT,SPACER,VENT,WJ999,.063-PL For use on: WJ 999,1000,1500 903169-001 PCB ASSY,REGULATOR,MFC,952 -APL 156771 912129-001 GENERATOR-SPARE PARTOLETE REPLACED BY 2006282-001 161521-001 VTR- SEAL,FLOATING PLENUM,200MM For use on: VTR 912271-001 HEAD,,INJECTOR,999-ASSY 2006088-001 SUPPORT, QUARTZ PROCESS TUBE, CVD, 300MM MB For use on: ... 165934-001 LATCH ASSY For use on: AVP/RVP200MM