Parts For Sale ASM 16-323521E01 ASM 16-323521E01 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details ASM 16-323521E01 Manufacturer ASM Part Number 16-323521E01 Description S BOTTOM PLATE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Refurbished 1.0 US Other ASM Parts 1018-680-01 ASM 1018-680-01 BRACKET-INNER GAS PANEL TOP 1060-225-01 ASM 1060-225-01 PANEL-SIDE ELECTRONICS PROCESS MODULE 1082-109-01 ASM 1082-109-01 PANEL-FRONT SIDE 16-194001-01 Semiconductor ASM Vacuum Assembly 16-194001-01 REV B, 10 ... 60-122483A08 O-RING AS275 WAFER TRANSFER O-RING - ELEVATOR SEAL PLATE ... AFC-261 MFC 16-320174B04 "GASKET RESTRICTOR (15 SLM) RESTRICTOR 15 SLM GASKET 1/4 ... 50-122938A96 Q+ FNC M4 MMMM (USE PN DPD222PC) fa0800326 TEMPERATURE CONTROLLER MP-888 INPUT: 210-240VAC OUTPUT: ... 1017-105-01 ASM 1017-105-01 BRANCH-OW P-DOPE TO REGULATOR