Parts For Sale ANELVA A12-66778 ANELVA A12-66778 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details ANELVA A12-66778 Manufacturer ANELVA Part Number A12-66778 Description Lower Pumping Shield Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 4.0 JP Other ANELVA Parts A16-27157 HOOK IMP-0233 RING CHUCK (66" CHUCK) C-36471 360 HIGH MELTING POINT SHIELD (SUS) A16-00505 BUSING, METAL (5) 1059-59425 CANON ANELVA 1059-59425 (HK-M) [ANELVA TIN] REACTIVE LOW ... A17-90930 THERMOCOUPLE HOLDER A13-59873 HEATER CIRCULAR PY190 UGD-IS GAUGE, ION TUBE A13-52956 SHIELD, COVER S-PMC