Equipment For Sale KOYO THERMO SYSTEMS VF5100 KOYO THERMO SYSTEMS VF5100 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Company: Email: * Message: Tool Details KOYO THERMO SYSTEMS VF5100 Manufacturer KOYO THERMO SYSTEMS Model VF5100 Wafer Size 4" Vintage 1992 Description Vertical Furnace, No missing parts Approx. Qty 1 Pricing Please inquire for pricing Photos (0) No photos available Other Available Tools ASM E2000 We also have the silicon source cabinets attached to the ... SVG 8626 Coater. 8626/3P/CP-4" Temescal 1800 1800 vacuum system with a cti 8 cryopump Branson L3100 Plasma stripper Rudolph Auto EL 2.4A Elipsometer AE Advanced Engineering VWM-871 Wafer mount