Equipment For Sale KOYO THERMO SYSTEMS VF5100 KOYO THERMO SYSTEMS VF5100 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Company: Email: * Message: Tool Details KOYO THERMO SYSTEMS VF5100 Manufacturer KOYO THERMO SYSTEMS Model VF5100 Wafer Size 4" Vintage 1992 Description Vertical Furnace, No missing parts Approx. Qty 1 Pricing Please inquire for pricing Photos (0) No photos available Other Available Tools ASM AD 830 Excellent Working Condition Novellus C3 Triple Speed Max Novellus C3 Triple Speed Max Triple Chamber Black Shie ... UltraPurge UP400 Gas Cabinet System Semix 30-000-0576 Spin coater AE Advanced Engineering VWM-871 Wafer mount COLD JET i3 Micro Clean CO2 Cleaner