Equipment For Sale KOYO THERMO SYSTEMS VF5100 KOYO THERMO SYSTEMS VF5100 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Company: Email: * Message: Tool Details KOYO THERMO SYSTEMS VF5100 Manufacturer KOYO THERMO SYSTEMS Model VF5100 Wafer Size 4" Vintage 1992 Description Vertical Furnace, No missing parts Approx. Qty 1 Pricing Please inquire for pricing Photos (0) No photos available Other Available Tools Chroma 3260 SLT Handler EBARA A70 EBARA A70 DNS SS-W80A-AR WAFER SCRUBBER SHINKAWA UTC-2000 Ball Bonder HERAEUS THU 60/60 Oven Plasmatherm 790 PECVD Plasmatherm 790 PECVD, 2001 Vintage