Equipment For Sale KOYO THERMO SYSTEMS VF5100 KOYO THERMO SYSTEMS VF5100 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Company: Email: * Message: Tool Details KOYO THERMO SYSTEMS VF5100 Manufacturer KOYO THERMO SYSTEMS Model VF5100 Wafer Size 4" Vintage 1992 Description Vertical Furnace Approx. Qty 1 Pricing Please inquire for pricing Photos (0) No photos available Other Available Tools YAC 246D Ambient +60C to +125C 5 full bins GPIB interace 2x2 Quad ... Fuji XPF ~30k cph AKROMETRIX PS400 WARPAGE Measurement JAPAN PIONICS UHP-20 Hydrogen Purifier DISCO DFD6360 DISCO DFD6360 wafer saw OLYMPUS MX50A-F & AL100N-LMB8 Olympus MX50A-F Microscope+AL100-LMB8 Autoloader