LAM 2300 Exelan Parts

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Tool Details

LAM 2300 Exelan Parts
Manufacturer
LAM
Model
2300 Exelan Parts
Description

2. ENI LFV3560A - QTY 8
3. ENI RF GENERATOR LVF3527A - QTY 8
4. ENI SPECTRUM B-8502 - QTY 8
5. ENI 660-034419-010 RF Generator - QTY 14
6. ENI DOFBC2-078 RF Generator - QTY 15
7. ENI DOFBC2-083 RF Generator - QTY 14
8. ENI DOFBC2-084 RF Generator - QTY 14
9. HYFRA eChilly 2-S Chiller (NEW) - 2 UNITS
10. HYFRA eChilly 2-S Chiller (USED) - 4 UNITS
11. LAM Pendulum valves 65048-PH52-BIV1 - 8 UNITS
12. LAM Pendulum valves 65048-PH52-ADR1 - 13 UNITS
13. LAM RESEARCH 575-800325-417 Gas boxes - QTY 18
14. LAM RESEARCH 853-802298-018 Elevator - QTY 15
15. APPLIED MATERIALS RTP HOUSING, 12" - QTY 1

16. LAM TOP CHAMBER 853-065009-006 - QTY 15
17. LAM POWER BOX 685-020105-904 - QTY 2
18. LAM RESEARCH CHAMBER + ESC + CATHODE - QTY 7
PN: 713-801020-008
PN: 175-069046-001
19. LAM RESEARCH CHAMBER + ESC + CATHODE - QTY 13
PN: 715-801020-118
PN: 853-065009-516
20. Edwards Turbopump STP-A2203C3 set - Qty 1
Includes 1x turbopump STP-A2203C3
Includes 1x Controller SCU-1500/1600
Includes 1x Cables B750-30-030

Approx. Qty
1
Pricing
Please inquire for pricing
Photos (60)