o Wafer Size: 200mm, notched, System crated    
o Right hand only unit    
o 104” Stand-Alone Cabinet    
o 2 Coat Modules w/chemical edge bead removal, 2 Develop    
o Modules, 6 Vacuum Back Ovens, 2 Vapor Prime Ovens, 3 chill    
o Plates, 1 OEBR Module    
o Photoresist Temperature control    
o Air Temperature and Humidity control(Coater and Developer)    
o Complete air recirculation environmental control over all modules    
o 4 serial arms and 1 90SE serial arm    
o Floor is solid SS spill containment w/overflow sensors    
o Solid doors in front of gauges and flow meters    
o Control Module on CES, (left or right-integrated)    
o Interface is rear pull    
o 208 volts, 3-phase 60Hz    
o Coater direct floor drain (Tee in cabinet)    
o Developer direct floor drain (Tee in cabinet)    
o Full clogged drain sensor on each coater    
o Full SEMI S2-93 Containment for solvent/pump drawer    
o enclosures, bulkhead    
o Facility sensors for vacuum generators, DI water and    
o Caustic exhaust    
o SECS Communication Port    
o Millipore controller / resist pump upgrades