Aixtron G5 HT
Tool Details
- Manufacturer
- Aixtron
- Model
- G5 HT
- Wafer Size
- 6"
- Vintage
- 2011
- Description
-
GaN on Si
8 x 6" wafer configuration
Used as an R&D tool, never in production
Photos (16)
GaN on Si
8 x 6" wafer configuration
Used as an R&D tool, never in production