Oxford Plasmalab 133
Tool Details
- Manufacturer
- Oxford
- Model
- Plasmalab 133
- Wafer Size
- 8"
- Description
-
200mm Oxford Plasmalab 133 PECVD system
single chamber
new computer and software upgrade
spare 602P pump stack
Photos (21)
200mm Oxford Plasmalab 133 PECVD system
single chamber
new computer and software upgrade
spare 602P pump stack