DW E-Beam Coater
Tool Details
- Manufacturer
- DW
- Model
- E-Beam Coater
- Description
-
35" x 45" Chamber
It has lamps with power supply, 3 single pocket Egun and CV 8 with sweep, dual axis planetary 6 x12 inch planet, CTI onboard 400 and 8510 compressor and match mechanical pump. IC6000 controller, single xtal, used for Ni/ Ti and Gold deposition.
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