MKS Instr. Astex AX3060
Tool Details
- Manufacturer
- MKS Instr.
- Model
- Astex AX3060
- Wafer Size
- 6"
- Description
-
MKS Astex AX3060 SmartMatch 3 kW Top Mount Microwave Matching Unit
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MKS Astex AX3060 SmartMatch 3 kW Top Mount Microwave Matching Unit