Tegal 901e
Tool Details
- Manufacturer
- Tegal
- Model
- 901e
- Description
-
Tegal 901e RIE Etcher Reactive Ion Etch, ENI ACG-10TRF Generator, Thermo Neslab M75
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Tegal 901e RIE Etcher Reactive Ion Etch, ENI ACG-10TRF Generator, Thermo Neslab M75