LAM 4500
Tool Details
- Manufacturer
- LAM
- Model
- 4500
- Wafer Size
- 6"
- Description
-
4500 Plasma Etcher
- 6 inch wafer processing
- LAM 853-110178-001-E1 Chiller
- Advanced Energy AE PDW 2200 RF Generator
- MFC
- Wafer loader.
- Manual books
Photos (24)
4500 Plasma Etcher
- 6 inch wafer processing
- LAM 853-110178-001-E1 Chiller
- Advanced Energy AE PDW 2200 RF Generator
- MFC
- Wafer loader.
- Manual books