JEOL JSM-6600
Tool Details
- Manufacturer
- JEOL
- Model
- JSM-6600
- Wafer Size
- 6"
- Vintage
- 1990
- Description
-
Includes EDX
- scanning microscope
- included EDX option
- 200VAC, 1 phase, 30A, 50/60Hz, 6KVA
- secondary electron image resolution (at 8mm working distance): at 35kV 3.5nm guaranteed and at 1kV 20.0nm atteinable
- magnification: 10x to 300'000x
- accelerating voltage: 0.2 to 40kV (0.2 to 5kV variable in 0.1kV steps, 5 to 40kV variable in 1kV steps)
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