Vacuum system:

Cryo compressor: CTI-9600 X1 Missing

Beamline cryo pump 1: OB 8 (P3)

Process cryo: 2, 3 OB 8 (P4,5)

Source pump: STP1003C (P1)

Beamline turbo pump: STP300C (P2a), STP1000C (P2b)

Terminal rough pump: EBARA Pump 40 x 20 (RP1, RP2) Missing

End station rough pump: EBARA Pump 50 x 20 (RP3) Missing

Vacuum controller: HCIG

End station info:

Cassette capability

(2) Cassette

Wafer size: 200 mm

Automatic notch alignment capability

Wafer handling system: In-air/In-vacuum high throughput

Particle filter system: Class 1, UPLA filtered wafer handling system

Chuck electrostatic clamp

Chuck cooling interlock: Yes

Asyst LPT2200 smif interface capability: NONE

Implant angle capability:

Variable implant angle

45 Deg tilt axis & 360 deg twist axis

Quad implant capability

Beam monitoring system:

Real-time patented dose control

Real-time beam profiler (single dimension)

Gas box option:

Modular gas box

(4) String gas boxes

High pressure string

(2) SDS String hydride (arsine and phosphine)

SDS String flouride (boron trifluoride)

(3) Pressure transducer on SDS string (per string): PSIA

Mass flow controller

(1) Kit unit 1660

(3) Kits unit 1662

Extraction PS:

0 - 40 KeV

Extraction voltage monitor: Yes

Vaporizer: Yes

Ion source: ETERNA ELS (extended life source ) - S10

Source bushing:

Extended life bushing

Source liner for extended life bushing

AMU System: Triple indexed mass analysis magnet / Power supply

Beam shutter: Yes

Beamline quads beam focus / Scanner: Yes

P-Lens PS: 0 - 68 KeV

Decel PS: 0 - 40 KeV

Accel PS: 0 - 142 KeV

Terminal transfomer: Oil-cooled transformer

Angular energy filter: Yes

Energy slit: Yes

Beam profiler with P-cup: Yes

Flag faraday with side cups: Yes

Charge control technology:

E-Shower: Yes

Closed-loop cooling system selection:

Cooling system: NESLAB Chiller

General info:

Control UPS: Yes

Main isolation transformer: Yes

Abatement system: EGS237 NOVAPURE

Smoke detector: Yes

Exhaust flow switch: Yes

Water leakage sensor: Yes

Light tower:Yes

Advanced automation package:

SUN SOLARIS Operator workstation:

SCSI Hard drive

Tape cartridge

17"/19" LCD Monitor

SECS I

SECS II Protocols

GEM Interface

Ethernet port

Chiller

E-Clamp

E-Shower controller & PSU

Flag faraday relay box

Cathode PSU

Filament PSU

Arc PSU

Beam profiler card include external box

DSP Motor controller

Source controller

CP1 Pump

Dosimetry frame include side cup & p-cup

PI Turbo pump include controller/harness

P2A Turbo pump include controller/harness

P2B Turbo pump include controller/harness

Cell controller

NOVA Pure scruber

Cryo compressor Missing

Robot Missing

Robot controller Missing

Ext electrode assy

Source and cooling flange

Source magnet PSU

Hi Resolution scanner

Scan generator Dl

AMU PSU

Terminal PD Dl - PD Dl

Beam shutter Dl - Dose Dl

Terminal beamline Dl - general 10 Dl

Gasbox Dl - gasbox Dl

Ground interface Dl - terminal Dl

Disk termocouple Dl - TC Pi

All IG Controller + (4) cable units

Aligner assy

CPU

HV Supp PSU

Extraction PSU

Quad PSU

Right scan amp

Digital teslameter

Scan suppression PSU

Accel PSU

Decel PSU

AEF PSU

Tx Arm include pneumatic assy

Osciloscope

IG / TC Gauge misc