Parts For Sale AXCELIS 682131 AXCELIS 682131 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 682131 Manufacturer AXCELIS Part Number 682131 Description FLANGE, COOLANT, PLASMA SOURCE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other AXCELIS Parts 170030780 Beam Stop 17320560 PLATE, LINER 17231630 AXCELIS 17231630 APPTURE QUAD EXIT VG 17335310 Filament Clamp Eterna ELS 3500027 O-Ring, Buna 170174465 17127830 INSULATOR,FILAMENT FEEDTHROUGH H3500451 ELEMENT HOLDER 170164266 170162020 170160061 170163417