Parts For Sale AXCELIS 170164266 AXCELIS 170164266 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 170164266 Manufacturer AXCELIS Part Number 170164266 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other AXCELIS Parts 536567 KIT THERMOCHUCK GPS II 208V W/CENTER PINS 170163262 17182590 STRIKE PLATE (3) DISK 170164255 3100-0029-0001 INSERT,GRAPHITE,ENERGY FILT 170174465 313806 TC ASSEMBLY FUSION GEMINI GPL 17394850 LINER OUTER BEAM STRIKER PLATE REV.A 4000059 Retaining Rod Spring 170163204 170163417 170163410