TEL / VARIAN MB2-730

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Tool Details

TEL / VARIAN MB2-730
Manufacturer
TEL / VARIAN
Model
MB2-730
Wafer Size
8"
Vintage
1996
Description

WSIX

Gas Flow:
-N2-4L/Min
-N2-125L/Min
-Ar-2200Sccm
-Wf6-40Sccm
-Cif3-1000Sccm
-DCS-1000Sccm
-SiH4-1000Sccm

Approx. Qty
1
Pricing
Please inquire for pricing
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