Parts For Sale LAM L147-Q664H LAM L147-Q664H Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM L147-Q664H Manufacturer LAM Part Number L147-Q664H Description CATHODE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 716-031257-531-A Qtz Ring Part of: Lam Versys 2300, PM1 839-031766-001 BELLOWS LIFTER 856-010350-001 KIT, RETO CLAMP PLUNGER EZ WA 716-006711-001 showerhead, graphite oxide For: LAM 723-001205-006 SPACER RND .14 X .25 X .38 839-014757-067 Weldment 839-014757-067 Flex Gas Feed Line 1/4" 721-000946-003 LOCK WASHER, SS PCB 000-061 REV M 715-460578-001 LIFTER, WAFER 4-PIN 730-037464-04 PSY730 RBN CBL, CTI TO INTCNCT PNL INTERIOR 131052003 SHIM, MYLAR, 0.010 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136