Parts For Sale LAM 666-390164-004 LAM 666-390164-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM 666-390164-004 Manufacturer LAM Part Number 666-390164-004 Description CA,CHMBR TC,ENCAP-8 FEMALE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other LAM Parts 716-140139-213 RING, HOT EDGE, HI WALL, ESC 8" 713-057586-001 PLUG,RTD,THRM CTRL PL 718-094756-061 ELCTD,UPR,6" ESC,MJR FLAT 716-031257-309 Ring.EDGE, TOP 300mm 716-540198-001 Etch Kit Components in Process Kit ComponentsWINDOW, F S ... 15-391861-09 PIN,MCA,SAPH,3/16DIA,0.8101IN,1 FLAT END 723-001205-006 SPACER RND .14 X .25 X .38 839-101870-002 713-330704-001 HSG SPR PCB 000-061 REV M 810-71082-004 Lam Research 810-17082-004 16 Channel Heater Control Boa ... 853-025952-002 RF SENSE BOX