Parts For Sale AXCELIS 61S0026 AXCELIS 61S0026 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details AXCELIS 61S0026 Manufacturer AXCELIS Part Number 61S0026 Description IC PC847 FOR GSD'S Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 3.0 US Other AXCELIS Parts 1193490 SPINDLE DIRECT DRIVE ASSY W/CHARGE SENSOR 0298-0178-0001 AXCELIS 0298-0178-0001 BRACKET 17099631 Inner Beam Dump w/AC 3500028 O-RING,BUNA 346 1708670 Arc Chamber End Plate 170158533 SHLD INNER CUP 17098511 Source Housing Exit Aperature /AC 17135960 SHOWER TUBE LINER (SERRATED) 4400120 SCREW,2-56 X 1/4 SOC HD CAP 17099661 Outer Beam Dump /AC 17170020 Extraction Electrode /AC 1174840 SENSOR INTERFACE BOX FRONT 11S1594 GSD