Parts For Sale LAM L147-Q664H LAM L147-Q664H Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details LAM L147-Q664H Manufacturer LAM Part Number L147-Q664H Description CATHODE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other LAM Parts 716-011009-001 Window Quartz (The Left Side) 856-010350-001 KIT, RETO CLAMP PLUNGER EZ WA 723-001205-006 SPACER RND .14 X .25 X .38 716-034737-001 qtz ring 715-350036-001 Ring, gas feed, flanged, 32 hole PCB 000-061 REV M 716-443086-401 Etch Kit Components in Process Kit ComponentsRING, HOT E ... 716-021886-002 O-RING, BELL JAR PFE 730-037464-04 PSY730 RBN CBL, CTI TO INTCNCT PNL INTERIOR 131052003 SHIM, MYLAR, 0.010 716-012639-024 NOZZLE, INJ. 8X, .055-45DEG RDL-1CTR 853-025901-001-1-C136 Lam Research 4420 EMO Assembly 853-025901-001-1-C136
